Description
DV100CS Series – Low Pressure Diaphragm Valves
Overview
The DV100CS series from Metriflow Solutions offers compact, ultra high purity diaphragm valves designed for low-pressure gas distribution in semiconductor and critical process systems. Featuring Elgiloy diaphragms and springless actuation, they are optimized for long cycle life and zero internal dead space.
Available Models:
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DV100CS-FJCR04-E – 1/4" Female VCR, Manual
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DV100CS-FJCR08-E – 1/2" Female VCR, Manual
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DV100CS-JCR04-E – 1/4" Male VCR, Manual
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DV100CS-TF04 – 1/4" Tube Fitting, Pneumatic NC
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DV100CS-TF04-PI – 1/4" Tube Fitting, Pneumatic NC, PI seat
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DV100CS-TF06 – 3/8" Tube Fitting, Pneumatic NC
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DV100CS-TF06-PI – 3/8" Tube Fitting, Pneumatic NC, PI seat
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DV100CS-TF08 – 1/2" Tube Fitting, Pneumatic NC
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DV100CS-TF08-PI – 1/2" Tube Fitting, Pneumatic NC, PI seat
Key Specifications
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Cv: 0.3 (1/4") to 0.7 (1/2")
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Pressure Rating: Max 145 psi
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Material: SS316L / VIM-VAR optional, Elgiloy diaphragm
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Seal Material: PCTFE (standard), PI optional
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Actuation: Manual / Pneumatic NC
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Leak Rate: ≤1×10⁻⁹ atm·cc/sec He
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Surface Finish: EP (Ra ≤ 0.125 μm), BA optional
Features
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Springless design reduces particle generation
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Cleaned and assembled in ISO Class 5 or 6 environments
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SEMI F20 and UHP compliant
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PE vacuum bagged packaging
Applications
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Semiconductor gas boxes (VMB/VMP)
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Tool process modules
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Inert and specialty gas distribution
Ordering Example
DV100CS-TF06-PI-E → Pneumatic NC, 3/8" TF, PI seat, EP finish
Need configuration support?
Contact us at support@metriflowsolutions.com
Technical Specifications
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