Key Features:
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Flow range: 0–5 sccm to 250 SLM
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Accuracy up to ±1% F.S.
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Fast response time (<3–5 sec)
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Suitable for inert and reactive gases
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Digital & analog communication (RS485 / 0–5V / 4–20mA)
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Stainless steel 316L wetted surfaces
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Ideal for semiconductor, biopharma, and R&D use