Description
RG220 Series — Medium & High Flow UHP Pressure Regulators
High flow. High purity. High stability.
The RG220 series pressure regulators from Metriflow Solutions are engineered for medium to high flow rate UHP gas applications, supporting inlet pressures up to 500 psi and stable outlet regulation at 150 psi. Constructed from 316L stainless steel, each unit is cleaned and assembled in ISO Class 5/6 cleanrooms and helium leak tested to ≤1×10⁻⁹ atm·cc/sec He.
RG220 regulators are ideal for bulk gas lines, tool gas panels, and point-of-use regulation in semiconductor and other critical process environments.
Featured Models
| Model | Inlet | Outlet | Port Type | Body Type | Description |
|---|---|---|---|---|---|
| RG220X-C-150-P-W-TF12-TF12-SS | 500 psi | 150 psi | 3/4" Tube Fitting (In/Out) | X-Type | Medium flow, symmetric TF ports |
| RG220C-C-150-P-W-TF12-QC12M-SS | 500 psi | 150 psi | 3/4" TF in / QC12M out | C-Type | High flow with quick-connect outlet |
Technical Features
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Cv Value: Up to 1.8 (high flow)
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Max Inlet Pressure: 500 psi (3.4 MPa)
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Outlet Ranges: 50 / 100 / 150 psi (customizable)
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Material: 316L SS body, Elgiloy diaphragm
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Connections: Tube Fitting (TF12), Quick Connect (QC12M)
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Surface Finish: Electropolished (EP) or BA optional
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Cleanroom Assembled: ISO Class 5 or 6
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Compliance: SEMI F20, UHP particle control
Looking for alternate flow ranges or outlet ports?
Contact our engineering team at support@metriflowsolutions.com
Technical Specifications
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