Precision control. Particle-free performance. Built for the most demanding gas delivery systems.
Metriflow Solutions’ UHP pressure regulators are engineered to deliver stable, contamination-free pressure control in semiconductor, biotech, and specialty gas applications. Designed for both inlet pressures up to 3000 psi and downstream stability within ±0.1 psi, our regulators ensure consistent process integrity over extended lifecycles.
All models are available with electropolished (EP) or bright annealed (BA) surface finishes and are cleaned and assembled in ISO Class 5 or 6 cleanrooms. Leak tested to ≤1×10⁻⁹ atm·cc/sec He, these regulators meet or exceed SEMI F20 / UHP standards.
Key Features
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High Accuracy Control: Cv values from 0.06 to 1.8, for ultra-fine to high-flow regulation
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Wide Pressure Range: Inlet pressures up to 3000 psi; outlet ranges from 0.5 to 250 psi
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Corrosion Resistance: All-welded 316L VIM-VAR construction, Elgiloy or Hastelloy diaphragms
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Interface Options: VCR®, NPT, and modular IGS-compatible formats
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Performance Certifications: SEMI F20, Helium leak test, Particle control verified