Metriflow Solutions provides a comprehensive line of thin-film process systems engineered for semiconductors, optics, and advanced material manufacturing. Our product range covers physical vapor deposition (PVD), chemical vapor deposition (CVD), and continuous roll-to-roll coating platforms — delivering precision control of film thickness, composition, and uniformity for both R&D and industrial-scale production.
Built in collaboration with China’s leading vacuum technology companies, these systems feature robust chamber design, intelligent plasma control, and modular process configurations, supporting multi-material coatings with exceptional reproducibility and efficiency.
Product Line Overview
1. Monomer Coating Equipment
Compact, versatile PVD systems for decorative, optical, or functional coatings.
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Coating types: Ti/Cr/Al-based nano-composite films
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Heating temperature: 500–550 °C
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Integrated GISETCH® gas ion-etching and Smart Shutter system
Applications: optical lenses, protective films, and decorative finishes.
2. Continuous Coating Equipment
High-efficiency systems for large-area substrates and continuous coating processes.
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Substrate width: up to 2500 mm
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Film uniformity: ≤ ±5%
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Substrate speed: 30–1000 mm/min
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Supports sputtering, arc, and evaporation sources
Applications: solar panels, reflective coatings, and functional metal sheets.
3. Magnetron Sputtering Winding Coating System
Roll-to-roll PVD sputtering system for ultra-thin flexible substrates.
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Substrate width: up to 2000 mm
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Coiling speed: 0.1–1000 m/min
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Cathode types: flat or rotating
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Drum temperature: –20 to 80 °C
Applications: flexible electronics, polymer films, and conductive foils.
4. Wire-Feeding Evaporation Winding Coating System
Advanced evaporation platform using metal wire feed sources for stable film growth.
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Evaporation boat source
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Ion-source pretreatment and heating stages
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Suitable for polymer or metallic foil substrates
Applications: conductive, reflective, and barrier coatings.
5. Electron-Beam Evaporation Winding Coating System
High-precision system using electron-beam evaporation for dense multilayer coatings.
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Modular multi-cathode configuration
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Real-time beam power and deposition rate control
Applications: high-reflectivity mirrors, optical films, and laser protection layers.
6. Chemical Vapor Deposition (CVD) Equipment
High-performance CVD systems for semiconductor and ceramic thin film fabrication.
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Temperature: 600–1800 °C
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Vacuum: ≤ 5 Pa
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Process pressure: 100–20,000 Pa
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Uniform gas distribution with multi-zone heating
Applications: dielectric coatings, barrier films, and ALD-style layer growth.
Highlights
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Film uniformity ≤ ±5% over large substrates
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Temperature range: –20 to 1800 °C
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Multi-zone plasma and bias control
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Supports sputtering, arc, and evaporation modes
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Continuous or batch operation configuration
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Smart interface for process monitoring and diagnostics