Precision control. Particle-free performance. Built for the most demanding gas delivery systems.

Metriflow Solutions’ UHP pressure regulators are engineered to deliver stable, contamination-free pressure control in semiconductor, biotech, and specialty gas applications. Designed for both inlet pressures up to 3000 psi and downstream stability within ±0.1 psi, our regulators ensure consistent process integrity over extended lifecycles.

All models are available with electropolished (EP) or bright annealed (BA) surface finishes and are cleaned and assembled in ISO Class 5 or 6 cleanrooms. Leak tested to ≤1×10⁻⁹ atm·cc/sec He, these regulators meet or exceed SEMI F20 / UHP standards.

Key Features

• High Accuracy Control: Cv values from 0.06 to 1.8, for ultra-fine to high-flow regulation

• Wide Pressure Range: Inlet pressures up to 3000 psi; outlet ranges from 0.5 to 250 psi

• Corrosion Resistance: All-welded 316L VIM-VAR construction, Elgiloy or Hastelloy diaphragms

• Interface Options: VCR®, NPT, and modular IGS-compatible formats

• Performance Certifications: SEMI F20, Helium leak test, Particle control verified